{"id":148192,"date":"2024-04-27T15:51:54","date_gmt":"2024-04-27T15:51:54","guid":{"rendered":"https:\/\/www.electricity-magnetism.org\/mems-%ec%98%a4%ec%8b%a4%eb%a0%88%ec%9d%b4%ed%84%b0\/"},"modified":"2024-04-27T15:52:02","modified_gmt":"2024-04-27T15:52:02","slug":"mems-%ec%98%a4%ec%8b%a4%eb%a0%88%ec%9d%b4%ed%84%b0","status":"publish","type":"post","link":"https:\/\/www.electricity-magnetism.org\/ko\/mems-%ec%98%a4%ec%8b%a4%eb%a0%88%ec%9d%b4%ed%84%b0\/","title":{"rendered":"MEMS \uc624\uc2e4\ub808\uc774\ud130"},"content":{"rendered":"<p class=\"sidekick\">MEMS \uc624\uc2e4\ub808\uc774\ud130\ub294 \uc815\ubc00\ud55c \uc2dc\uac04 \uce21\uc815 \ubc0f \uc2e0\ud638 \ucc98\ub9ac\uc5d0 \ud544\uc218\uc801\uc778 \ub9c8\uc774\ud06c\ub85c\ubbf8\ud130 \uaddc\ubaa8\uc758 \ubc18\ub3c4\uccb4 \uae30\ubc18 \uc9c4\ub3d9 \ubc1c\uc0dd \uc7a5\uce58\uc785\ub2c8\ub2e4.<\/p>\n<p><img decoding=\"async\" src=\"https:\/\/www.electricity-magnetism.org\/wp-content\/uploads\/2024\/04\/MEMS-\uc624\uc2e4\ub808\uc774\ud130.png\" alt=\"MEMS \uc624\uc2e4\ub808\uc774\ud130\"\/><\/p>\n<h2>MEMS \uc624\uc2e4\ub808\uc774\ud130\ub780 \ubb34\uc5c7\uc778\uac00?<\/h2>\n<p>MEMS \uc624\uc2e4\ub808\uc774\ud130(Micro-Electro-Mechanical Systems Oscillator)\ub294 \ub9c8\uc774\ud06c\ub85c\ubbf8\ud130 \uaddc\ubaa8\uc758 \uae30\uacc4\uc801 \uad6c\uc870\ubb3c \ubc0f \uc804\uc790 \ud68c\ub85c\ub97c \uc774\uc6a9\ud558\uc5ec \uc9c4\ub3d9\uc744 \ubc1c\uc0dd\uc2dc\ud0a4\ub294 \uc7a5\uce58\ub97c \ub9d0\ud569\ub2c8\ub2e4. MEMS \uae30\uc220\uc740 \uadf9\ub3c4\ub85c \uc791\uc740 \ud06c\uae30\uc758 \ubb3c\ub9ac\uc801 \uc7a5\uce58\uc640 \uc804\uc790 \ud68c\ub85c\ub97c \ud558\ub098\uc758 \uc2dc\uc2a4\ud15c\uc73c\ub85c \ud1b5\ud569\ud558\uc5ec, \uc804\ud1b5\uc801\uc778 \uc804\uc790 \uc7a5\uce58\ubcf4\ub2e4 \ub354 \uc801\uc740 \uc804\ub825\uc73c\ub85c \uc791\ub3d9\ud558\uba74\uc11c, \ub354\uc6b1 \ub192\uc740 \uc815\ubc00\ub3c4\uc640 \uc2e0\ub8b0\uc131\uc744 \ub2ec\uc131\ud560 \uc218 \uc788\uac8c \ud569\ub2c8\ub2e4.<\/p>\n<h2>MEMS \uc624\uc2e4\ub808\uc774\ud130\uc758 \uc791\ub3d9 \uc6d0\ub9ac<\/h2>\n<p>MEMS \uc624\uc2e4\ub808\uc774\ud130\ub294 \uc804\uae30 \uc2e0\ud638\ub97c \uae30\uacc4\uc801 \uc6b4\ub3d9\uc73c\ub85c \ubcc0\ud658\ud558\uac70\ub098 \uadf8 \ubc18\ub300\uc758 \ubcc0\ud658\uc744 \uc218\ud589\ud558\ub294 \ubcc0\ud658\uae30(micro transducer)\uc758 \uc77c\uc885\uc785\ub2c8\ub2e4. \uc77c\ubc18\uc801\uc73c\ub85c MEMS \uc624\uc2e4\ub808\uc774\ud130\ub294 \uc11d\uc601 \ud06c\ub9ac\uc2a4\ud0c8 \uc624\uc2e4\ub808\uc774\ud130\ubcf4\ub2e4 \uc791\uc740 \ud06c\uae30\ub85c, \uc815\ubc00\ud55c \uc2dc\uac04 \uce21\uc815 \ubc0f \uc2dc\uadf8\ub110 \ucc98\ub9ac\uc5d0 \ud65c\uc6a9\ub429\ub2c8\ub2e4. MEMS \uc624\uc2e4\ub808\uc774\ud130\uc758 \ud575\uc2ec \uad6c\uc131\uc694\uc18c\ub294 \uc9c4\ub3d9\uc744 \ubc1c\uc0dd\uc2dc\ud0a4\ub294 \ub9c8\uc774\ud06c\ub85c\uc2a4\ucf00\uc77c\uc758 \uae30\uacc4\uc801 \uacf5\uc9c4\uae30(resonator)\ub85c, \uc8fc\ub85c \uc2e4\ub9ac\ucf58 \ubb3c\uc9c8\uc744 \uc0ac\uc6a9\ud569\ub2c8\ub2e4.<\/p>\n<p>MEMS \uc624\uc2e4\ub808\uc774\ud130\ub294 \uc804\uc555\uc744 \uacf5\uc9c4\uae30\uc5d0 \uc801\uc6a9\ud560 \ub54c \ubc1c\uc0dd\ud558\ub294 \uc815\uc804\ub825(electrostatic force)\uc5d0 \uc758\ud574 \uc6c0\uc9c1\uc785\ub2c8\ub2e4. \uc774\ub54c \uacf5\uc9c4\uae30\ub294 \ud2b9\uc815\ud55c \uace0\uc720 \uc8fc\ud30c\uc218(natural frequency)\uc5d0\uc11c \uc9c4\ub3d9\ud558\uba70, \uc774 \uc8fc\ud30c\uc218\ub294 \uacf5\uc9c4\uae30\uc758 \ud06c\uae30, \ubaa8\uc591, \uadf8\ub9ac\uace0 \uc7ac\uc9c8\uc5d0 \uc758\ud574 \uacb0\uc815\ub429\ub2c8\ub2e4. \uc774 \uace0\uc720 \uc8fc\ud30c\uc218\ub97c \uae30\ubc18\uc73c\ub85c \uc804\uc790 \ud68c\ub85c\uac00 \ucc38\uc870 \uc2e0\ud638(reference signal)\ub97c \uc0dd\uc131\ud558\uba70, \uc774\ub294 \uc2dc\uacc4(clock) \uc2e0\ud638\ub098 \ub2e4\ub978 \uc804\uc790\uc801 \uae30\ub2a5\uc744 \uc81c\uc5b4\ud558\ub294 \ub370 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n<h2>MEMS \uc624\uc2e4\ub808\uc774\ud130\uc758 \uc751\uc6a9 \ubd84\uc57c<\/h2>\n<ul>\n<li><strong>\ubaa8\ubc14\uc77c \uae30\uae30:<\/strong> \uc2a4\ub9c8\ud2b8\ud3f0\uacfc \ud0dc\ube14\ub9bf \ub4f1\uc5d0\uc11c \uc815\ubc00\ud55c \uc2dc\uac04 \ucd94\uc801 \ubc0f RF(Radio Frequency) \uc2e0\ud638 \uc0dd\uc131\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/li>\n<li><strong>\uc790\ub3d9\ucc28:<\/strong> \ucc28\ub7c9 \ub0b4\ubd80\uc758 \ub124\ud2b8\uc6cc\ud06c \ud1b5\uc2e0 \ubc0f \uc13c\uc11c \ub370\uc774\ud130 \ucc98\ub9ac\ub97c \uc704\ud55c \uc815\ubc00\ud55c \ud0c0\uc774\ubc0d \uc194\ub8e8\uc158\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uc0b0\uc5c5\uc6a9 \uc7a5\ube44:<\/strong> \uc0b0\uc5c5 \ud658\uacbd\uc5d0\uc11c\uc758 \uacac\uace0\ud55c \ud0c0\uc774\ubc0d \uc194\ub8e8\uc158\uc73c\ub85c\uc11c, \uc9c4\ub3d9\uc774\ub098 \uace0\uc628 \uac19\uc740 \uadf9\ud55c \ud658\uacbd\uc5d0\uc11c\ub3c4 \uc548\uc815\uc801\uc73c\ub85c \uc791\ub3d9\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\ud1b5\uc2e0 \uc7a5\ube44:<\/strong> \ubb34\uc120 \uae30\uc9c0\uad6d \ub4f1\uc5d0\uc11c \uace0\uc815\ubc00\ub3c4\uc758 \uc2e0\ud638 \uc2dc\uc2a4\ud15c\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uc758\ub8cc \ubd84\uc57c:<\/strong> \uc6e8\uc5b4\ub7ec\ube14 \uc758\ub8cc \uc7a5\ube44\ub098 \uc774\uc2dd\ud615 \uc758\ub8cc \uae30\uae30\uc5d0 \uc0ac\uc6a9\ub418\uc5b4, \uc18c\ud615\ud654\uc640 \uc800\uc804\ub825 \uc18c\ube44\uc758 \uc774\uc810\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<h2>MEMS \uc624\uc2e4\ub808\uc774\ud130\uc758 \uc7a5\uc810<\/h2>\n<p>MEMS \uc624\uc2e4\ub808\uc774\ud130\ub294 \uc791\uc740 \ud06c\uae30\uc640 \ub0ae\uc740 \uc804\ub825 \uc18c\ube44, \ub6f0\uc5b4\ub09c \uc815\ubc00\ub3c4\uac00 \ud2b9\uc9d5\uc785\ub2c8\ub2e4. \ub610\ud55c MEMS \uae30\uc220\uc740 \uacac\uace0\ud568\uacfc \uc2e0\ub8b0\uc131\uc744 \uac15\ud654\ud558\uace0, \ub2e4\uc591\ud55c \ud658\uacbd \uc870\uac74 \ud558\uc5d0\uc11c\ub3c4 \uc548\uc815\uc801\uc778 \uc131\ub2a5\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. \ud2b9\ud788 \uace0\uc628\uc774\ub098 \uac15\ud55c \uc9c4\ub3d9\uacfc \uac19\uc740 \ud658\uacbd\uc5d0\uc11c\ub3c4 \uae30\ub2a5\uc744 \uc720\uc9c0\ud55c\ub2e4\ub294 \uc810\uc5d0\uc11c \uc804\ud1b5\uc801\uc778 \uc624\uc2e4\ub808\uc774\ud130\uc5d0 \ube44\ud574 \uc6b0\uc218\ud55c \ub0b4\uad6c\uc131\uc744 \uac00\uc9c0\uace0 \uc788\ub2e4\uace0 \ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>MEMS \uc624\uc2e4\ub808\uc774\ud130\ub294 \uc11d\uc601 \ud06c\ub9ac\uc2a4\ud0c8 \uc624\uc2e4\ub808\uc774\ud130\uc5d0 \ube44\uad50\ud558\uc5ec \uc81c\uc870 \uacfc\uc815\uc758 \ubcf5\uc7a1\uc131\uc744 \uc904\uc774\uba70, \ub300\ub7c9 \uc0dd\uc0b0\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4. \uc774\ub85c \uc778\ud574 \ub2e4\uc591\ud55c \uc804\uc790 \uc7a5\ube44\uc5d0 \uc27d\uac8c \ud1b5\ud569\ub420 \uc218 \uc788\uace0, \ube44\uc6a9 \ud6a8\uc728\uc801\uc778 \uc194\ub8e8\uc158\uc774 \ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<h2>MEMS \uc624\uc2e4\ub808\uc774\ud130\uc758 \ubbf8\ub798<\/h2>\n<p>MEMS \uc624\uc2e4\ub808\uc774\ud130 \uae30\uc220\uc740 \uc9c0\uc18d\uc801\uc73c\ub85c \ubc1c\uc804\ud558\uace0 \uc788\uc73c\uba70, \ud5a5\ud6c4 IoT(Internet of Things), \uc790\uc728 \uc8fc\ud589 \ucc28\ub7c9, \uc2a4\ub9c8\ud2b8 \uc2dc\ud2f0 \ubc0f \uc2a4\ub9c8\ud2b8 \uadf8\ub9ac\ub4dc\uc640 \uac19\uc740 \ubd84\uc57c\uc5d0\uc11c \ud575\uc2ec\uc801\uc778 \uc5ed\ud560\uc744 \ud560 \uac83\uc73c\ub85c \uae30\ub300\ub429\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uae30\uc220\uc758 \ubc1c\uc804\uc740 \ub354 \uc791\uace0 \ud6a8\uc728\uc801\uc778 \uc804\uc790 \uc7a5\uce58\uc758 \uac1c\ubc1c\uc744 \uc704\ud55c \uc5ec\uc815\uc5d0\uc11c \uc911\uc694\ud55c \uc9c0\ud45c\uac00 \ub420 \uac83\uc785\ub2c8\ub2e4.<\/p>\n<p>\uc815\ubc00\ub3c4\uc640 \uc2e0\ub8b0\uc131 \uba74\uc5d0\uc11c MEMS \uc624\uc2e4\ub808\uc774\ud130\ub294 \ud5a5\ud6c4 \ub354 \ub9ce\uc740 \uc0b0\uc5c5 \ubd84\uc57c\uc5d0\uc11c \ud544\uc218\uc801\uc778 \ubd80\ud488\uc73c\ub85c \uc790\ub9ac\uc7a1\uc744 \uac83\uc774\uba70, \uc6b0\ub9ac\uc758 \uc77c\uc0c1 \uc0dd\ud65c\uc5d0 \ub354\uc6b1 \uae4a\uc774 \ud1b5\ud569\ub420 \uc608\uc815\uc785\ub2c8\ub2e4.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>MEMS \uc624\uc2e4\ub808\uc774\ud130\ub294 \uc815\ubc00\ud55c \uc2dc\uac04 \uce21\uc815 \ubc0f \uc2e0\ud638 \ucc98\ub9ac\uc5d0 \ud544\uc218\uc801\uc778 \ub9c8\uc774\ud06c\ub85c\ubbf8\ud130 \uaddc\ubaa8\uc758 \ubc18\ub3c4\uccb4 \uae30\ubc18 \uc9c4\ub3d9 \ubc1c\uc0dd \uc7a5\uce58\uc785\ub2c8\ub2e4.<\/p>\n","protected":false},"author":1,"featured_media":183400,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_generate-full-width-content":"","footnotes":""},"categories":[88],"tags":[89],"class_list":["post-148192","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-88","tag-89","generate-columns","tablet-grid-50","mobile-grid-100","grid-parent","grid-50"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v17.9 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>MEMS \uc624\uc2e4\ub808\uc774\ud130 | \uc791\ub3d9 \ubc29\uc2dd, \uc751\uc6a9 \ud504\ub85c\uadf8\ub7a8 \ubc0f \uc7a5\uc810<\/title>\n<meta name=\"description\" content=\"MEMS \uc624\uc2e4\ub808\uc774\ud130\ub294 \uc815\ubc00\ud55c \uc2dc\uac04 \uce21\uc815 \ubc0f \uc2e0\ud638 \ucc98\ub9ac\uc5d0 \ud544\uc218\uc801\uc778 \ub9c8\uc774\ud06c\ub85c\ubbf8\ud130 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