{"id":146873,"date":"2024-04-27T12:53:14","date_gmt":"2024-04-27T12:53:14","guid":{"rendered":"https:\/\/www.electricity-magnetism.org\/mems-%ea%b0%80%ec%86%8d%eb%8f%84%ea%b3%84\/"},"modified":"2024-04-27T12:53:14","modified_gmt":"2024-04-27T12:53:14","slug":"mems-%ea%b0%80%ec%86%8d%eb%8f%84%ea%b3%84","status":"publish","type":"post","link":"https:\/\/www.electricity-magnetism.org\/ko\/mems-%ea%b0%80%ec%86%8d%eb%8f%84%ea%b3%84\/","title":{"rendered":"MEMS \uac00\uc18d\ub3c4\uacc4"},"content":{"rendered":"<p class=\"sidekick\">MEMS \uac00\uc18d\ub3c4\uacc4\uc5d0 \uad00\ud55c \uae30\uc0ac\ub85c MEMS \uae30\uc220\uc744 \uc774\uc6a9\ud55c \uac00\uc18d\ub3c4 \uce21\uc815 \uc13c\uc11c\uc758 \uc791\ub3d9 \uc6d0\ub9ac, \uc751\uc6a9 \ubd84\uc57c \ubc0f \uc7a5\ub2e8\uc810\uc744 \ub2e4\ub8f9\ub2c8\ub2e4.<\/p>\n<p><img decoding=\"async\" src=\"https:\/\/www.electricity-magnetism.org\/wp-content\/uploads\/2024\/04\/MEMS-\uac00\uc18d\ub3c4\uacc4.png\" alt=\"MEMS \uac00\uc18d\ub3c4\uacc4\"\/><\/p>\n<h2>MEMS \uac00\uc18d\ub3c4\uacc4\ub780?<\/h2>\n<p>MEMS \uac00\uc18d\ub3c4\uacc4\ub294 &#8216;\ubbf8\uc138 \uc804\uae30 \uae30\uacc4 \uc2dc\uc2a4\ud15c'(MEMS, Micro-Electro-Mechanical Systems) \uae30\uc220\uc744 \uc774\uc6a9\ud574 \ub9cc\ub4e0 \uc18c\ud615 \uac00\uc18d\ub3c4 \uc13c\uc11c\uc785\ub2c8\ub2e4. \uc774 \uc13c\uc11c\ub4e4\uc740 \ubb3c\uccb4\uc758 \uac00\uc18d\ub3c4\ub97c \uce21\uc815\ud558\uba70, \uc8fc\ub85c \uc2a4\ub9c8\ud2b8\ud3f0, \uc790\ub3d9\ucc28, \ube44\ud589\uae30, \uc0b0\uc5c5 \uc7a5\ube44 \ub4f1\uc5d0 \ud65c\uc6a9\ub429\ub2c8\ub2e4. MEMS \uac00\uc18d\ub3c4\uacc4\uac00 \uc791\uc740 \ud06c\uae30 \ub54c\ubb38\uc5d0, \uc791\uc740 \uc804\ub825\uc73c\ub85c\ub3c4 \ub3d9\uc791\ud560 \uc218 \uc788\uc73c\uba70, \uacbd\uc81c\uc801\uc774\uace0 \uc2e0\ub8b0\ud560 \uc218 \uc788\ub294 \uc131\ub2a5\uc744 \uc790\ub791\ud569\ub2c8\ub2e4.<\/p>\n<h2>MEMS \uac00\uc18d\ub3c4\uacc4\uc758 \uc791\ub3d9 \uc6d0\ub9ac<\/h2>\n<p>MEMS \uae30\uc220\uc744 \ud1b5\ud574 \uc81c\uc791\ub41c \uac00\uc18d\ub3c4\uacc4\ub294 \ub9c8\uc774\ud06c\ub85c\uc2a4\ucf00\uc77c\uc5d0\uc11c \uae30\uacc4\uc801 \uad6c\uc870\uc640 \uc804\uc790 \ud68c\ub85c\ub97c \ud1b5\ud569\ud55c \uc7a5\ube44\uc785\ub2c8\ub2e4. \uc774 \uc7a5\ube44\ub4e4\uc740 \uc8fc\ub85c \uc2e4\ub9ac\ucf58 \ubb3c\uc9c8\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc81c\uc791\ub418\uba70, \uac00\uc18d\ub3c4\ub97c \uce21\uc815\ud560 \ub54c \ubc1c\uc0dd\ud558\ub294 \ubb3c\ub9ac\uc801 \ubcc0\uc704\ub97c \uc804\uae30 \uc2e0\ud638\ub85c \ubcc0\ud658\ud558\ub294 \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4. \ubcc0\uc704\ub294 \uc9c8\ub7c9, \uc2a4\ud504\ub9c1, \uadf8\ub9ac\uace0 \uac10\uc9c0\uae30\ub85c \uad6c\uc131\ub41c \uc815\ubc00\ud55c \uad6c\uc870\uc5d0 \uc758\ud574 \ubc1c\uc0dd\ud558\uba70, \uc774\ub97c \ud1b5\ud574 \uac00\uc18d\ub3c4\ub97c \uce21\uc815\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>MEMS \uac00\uc18d\ub3c4\uacc4\ub294 \ub2e4\uc74c\uacfc \uac19\uc740 \ubc29\uc2dd\uc73c\ub85c \uc791\ub3d9\ud569\ub2c8\ub2e4:<\/p>\n<ul>\n<li><b>\uac10\uc9c0 \uc9c8\ub7c9:<\/b> \uac00\uc18d\ub825\uc774 \uac00\ud574\uc9c0\uba74, \uc7a5\uce58 \ub0b4\ubd80\uc758 \ubbf8\uc138\ud55c \uac10\uc9c0 \uc9c8\ub7c9(mass)\uc774 \uc774\ub3d9\ud569\ub2c8\ub2e4.<\/li>\n<li><b>\uc2a4\ud504\ub9c1:<\/b> \uac10\uc9c0 \uc9c8\ub7c9\uc740 \uc2a4\ud504\ub9c1(spring)\uacfc \uacb0\ud569\ub418\uc5b4 \uc788\uc5b4, \uc774 \uc2a4\ud504\ub9c1\uc758 \ud0c4\uc131\uc744 \uc774\uc6a9\ud574\uc11c \uc6c0\uc9c1\uc784\uc744 \uc81c\uc5b4\ud569\ub2c8\ub2e4.<\/li>\n<li><b>\uc804\uae30 \uc2e0\ud638 \ubcc0\ud658:<\/b> \uc9c8\ub7c9\uc758 \uc6c0\uc9c1\uc784\uc740 \uce90\ud328\uc2dc\ud134\uc2a4(capacitance) \ub610\ub294 \uc800\ud56d(resistance)\uc758 \ubcc0\ud654\ub97c \uc77c\uc73c\ud0a4\uba70, \uc774\ub97c \uc804\uae30 \uc2e0\ud638\ub85c \ubcc0\ud658\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<h2>MEMS \uac00\uc18d\ub3c4\uacc4\uc758 \uc751\uc6a9<\/h2>\n<p>MEMS \uac00\uc18d\ub3c4\uacc4\ub294 \uc13c\uc11c \uae30\uc220\uc758 \ud601\uc2e0\uc744 \ub300\ud45c\ud558\uba70, \ub2e4\uc591\ud55c \ubd84\uc57c\uc5d0\uc11c \uc751\uc6a9\ub429\ub2c8\ub2e4:<\/p>\n<ol>\n<li><b>\ubaa8\ubc14\uc77c \uae30\uae30:<\/b> \uc2a4\ub9c8\ud2b8\ud3f0\uc774\ub098 \ud0dc\ube14\ub9bf\uc758 \ud654\uba74 \uc804\ud658, \ub2e8\uacc4 \uce21\uc815, \uac8c\uc784 \ucee8\ud2b8\ub864 \ub4f1\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/li>\n<li><b>\uc790\ub3d9\ucc28:<\/b> \ucda9\ub3cc \uac10\uc9c0 \uc2dc \uc5d0\uc5b4\ubc31 \ud2b8\ub9ac\uac70\ub9c1, \ucc28\ub7c9 \uc548\uc815\uc131 \uc81c\uc5b4 \ub4f1\uc5d0 \uae30\uc5ec\ud569\ub2c8\ub2e4.<\/li>\n<li><b>\uc758\ub8cc \uc7a5\ube44:<\/b> \ud658\uc790\uc758 \uc2e0\uccb4 \uc6b4\ub3d9\uc744 \uac10\uc9c0\ud558\ub294 \uc6a9\ub3c4\ub85c \ud65c\uc6a9\ub418\uba70, \ud65c\ub3d9 \ubaa8\ub2c8\ud130 \uac00\uc6b4\ub370 \ud558\ub098\uc785\ub2c8\ub2e4.<\/li>\n<li><b>\uc0b0\uc5c5 \ubc0f \uac74\ucd95:<\/b> \uac74\ucd95 \uad6c\uc870\ubb3c\uc758 \uc9c4\ub3d9\uacfc \ubcc0\uc704\ub97c \ubaa8\ub2c8\ud130\ub9c1\ud558\uc5ec \uc548\uc804\uc744 \uac10\uc2dc\ud569\ub2c8\ub2e4.<\/li>\n<\/ol>\n<h2>\uc774\uc810 \ubc0f \ud55c\uacc4<\/h2>\n<p>MEMS \uac00\uc18d\ub3c4\uacc4\ub294 \uc5ec\ub7ec \uc7a5\uc810\uc744 \uac16\uace0 \uc788\uc73c\ub098, \uba87 \uac00\uc9c0 \ud55c\uacc4\ub3c4 \uc874\uc7ac\ud569\ub2c8\ub2e4. \uc7a5\uc810\uc73c\ub85c\ub294 \ub0ae\uc740 \uc804\ub825 \uc18c\ube44, \uc18c\ud615\ud654, \ub300\ub7c9 \uc0dd\uc0b0\uc73c\ub85c \uc778\ud55c \ube44\uc6a9 \uc808\uac10 \ub4f1\uc774 \uc788\uc2b5\ub2c8\ub2e4. \uadf8\ub7ec\ub098, \uc628\ub3c4 \ubcc0\ud654\ub098 \uc678\ubd80 \ud658\uacbd\uc73c\ub85c \uc778\ud55c \uac10\ub3c4 \uc800\ud558, \uc815\ubc00\ub3c4 \uc81c\ud55c \ub4f1\uc758 \ud55c\uacc4\ub3c4 \uc788\uc744 \uc218 \uc788\uc5b4, \uc751\uc6a9 \ubd84\uc57c\uc5d0 \ub530\ub77c \uc801\uc808\ud55c \ubcf4\uc815\uacfc \uc124\uacc4\uac00 \ud544\uc694\ud569\ub2c8\ub2e4.<\/p>\n<p>\ucd5c\uc885\uc801\uc73c\ub85c, MEMS \uac00\uc18d\ub3c4\uacc4\ub294 \ud604\ub300 \uae30\uc220\uc774 \uc81c\uacf5\ud558\ub294 \uc2e0\uae30\uc220\uc758 \uc88b\uc740 \uc608\ub85c, \uc6b0\ub9ac \uc0dd\ud65c\uc5d0 \uad11\ubc94\uc704\ud558\uac8c \ud1b5\ud569\ub418\uc5b4 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \uac00\uc18d\ub3c4\uacc4\ub4e4\uc774 \uc81c\uacf5\ud558\ub294 \uc815\ubcf4\ub294 \uc548\uc804\ud558\uace0 \ud3b8\ub9ac\ud55c \ud658\uacbd\uc744 \uc870\uc131\ud558\ub294 \ub370 \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4. \ub610\ud55c, MEMS \uae30\uc220 \uac1c\ubc1c\uacfc \ud1b5\ud569\uc5d0 \ub530\ub978 \uc0c8\ub85c\uc6b4 \uc751\uc6a9 \ubd84\uc57c\uc640 \uc131\ub2a5 \ud5a5\uc0c1\uc774 \uc9c0\uc18d\uc801\uc73c\ub85c \uae30\ub300\ub429\ub2c8\ub2e4.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>MEMS \uac00\uc18d\ub3c4\uacc4\uc5d0 \uad00\ud55c \uae30\uc0ac\ub85c MEMS \uae30\uc220\uc744 \uc774\uc6a9\ud55c \uac00\uc18d\ub3c4 \uce21\uc815 \uc13c\uc11c\uc758 \uc791\ub3d9 \uc6d0\ub9ac, \uc751\uc6a9 \ubd84\uc57c \ubc0f \uc7a5\ub2e8\uc810\uc744 \ub2e4\ub8f9\ub2c8\ub2e4.<\/p>\n","protected":false},"author":1,"featured_media":171737,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_generate-full-width-content":"","footnotes":""},"categories":[88],"tags":[89],"class_list":["post-146873","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-88","tag-89","generate-columns","tablet-grid-50","mobile-grid-100","grid-parent","grid-50"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v17.9 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>MEMS \uac00\uc18d\ub3c4\uacc4 | \uc791\ub3d9 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