{"id":167605,"date":"2024-04-27T12:46:30","date_gmt":"2024-04-27T12:46:30","guid":{"rendered":"https:\/\/www.electricity-magnetism.org\/mems%e3%83%99%e3%83%bc%e3%82%b9%e3%81%ae%e9%9b%bb%e6%b5%81%e3%82%bb%e3%83%b3%e3%82%b5%e3%83%bc\/"},"modified":"2024-05-11T12:17:41","modified_gmt":"2024-05-11T12:17:41","slug":"mems%e3%83%99%e3%83%bc%e3%82%b9%e3%81%ae%e9%9b%bb%e6%b5%81%e3%82%bb%e3%83%b3%e3%82%b5%e3%83%bc","status":"publish","type":"post","link":"https:\/\/www.electricity-magnetism.org\/ja\/mems%e3%83%99%e3%83%bc%e3%82%b9%e3%81%ae%e9%9b%bb%e6%b5%81%e3%82%bb%e3%83%b3%e3%82%b5%e3%83%bc\/","title":{"rendered":"MEMS\u30d9\u30fc\u30b9\u306e\u96fb\u6d41\u30bb\u30f3\u30b5\u30fc"},"content":{"rendered":"<p class=\"sidekick\">MEMS\u30d9\u30fc\u30b9\u306e\u96fb\u6d41\u30bb\u30f3\u30b5\u30fc\u306b\u7126\u70b9\u3092\u5f53\u3066\u3001\u305d\u306e\u539f\u7406\u3001\u5229\u70b9\u3001\u53ca\u3073\u7523\u696d\u3067\u306e\u5fdc\u7528\u4f8b\u306b\u3064\u3044\u3066\u89e3\u8aac\u3059\u308b\u8a18\u4e8b\u3067\u3059\u3002\u5c0f\u578b\u3067\u9ad8\u6027\u80fd\u306aMEMS\u6280\u8853\u304c\u3069\u306e\u3088\u3046\u306b\u96fb\u6d41\u6e2c\u5b9a\u306b\u9769\u547d\u3092\u3082\u305f\u3089\u3057\u3066\u3044\u308b\u304b\u3092\u7d39\u4ecb\u3002<\/p>\n<p><img decoding=\"async\" src=\"https:\/\/www.electricity-magnetism.org\/wp-content\/uploads\/2024\/05\/MEMS\u30d9\u30fc\u30b9\u306e\u96fb\u6d41\u30bb\u30f3\u30b5\u30fc.png\" alt=\"MEMS\u30d9\u30fc\u30b9\u306e\u96fb\u6d41\u30bb\u30f3\u30b5\u30fc\"\/><\/p>\n<h2>MEMS\u30d9\u30fc\u30b9\u306e\u96fb\u6d41\u30bb\u30f3\u30b5\u30fc\u306e\u57fa\u790e<\/h2>\n<p>MEMS(Micro Electro Mechanical Systems)\u306f\u3001\u96fb\u5b50\u56de\u8def\u3068\u6a5f\u68b0\u90e8\u54c1\u3092\u5fae\u7d30\u52a0\u5de5\u6280\u8853\u306b\u3088\u3063\u3066\u4e00\u3064\u306e\u30c1\u30c3\u30d7\u4e0a\u306b\u7d71\u5408\u3057\u305f\u30b7\u30b9\u30c6\u30e0\u3067\u3059\u3002MEMS\u6280\u8853\u3092\u5229\u7528\u3057\u305f\u96fb\u6d41\u30bb\u30f3\u30b5\u30fc\u306f\u3001\u305d\u306e\u5c0f\u3055\u3055\u3068\u9ad8\u6027\u80fd\u3067\u6ce8\u76ee\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u30bb\u30f3\u30b5\u30fc\u306f\u3001\u975e\u63a5\u89e6\u3067\u96fb\u6d41\u3092\u691c\u51fa\u3057\u3001\u96fb\u529b\u7ba1\u7406\u3084\u76e3\u8996\u30b7\u30b9\u30c6\u30e0\u306a\u3069\u69d8\u3005\u306a\u5206\u91ce\u3067\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n<h2>MEMS\u96fb\u6d41\u30bb\u30f3\u30b5\u30fc\u306e\u52d5\u4f5c\u539f\u7406<\/h2>\n<p>MEMS\u30d9\u30fc\u30b9\u306e\u96fb\u6d41\u30bb\u30f3\u30b5\u30fc\u306f\u3001\u4e3b\u306b\u30ac\u30ea\u30d0\u30ce\u78c1\u6c17\u52b9\u679c(GMI\u52b9\u679c)\u3084\u78c1\u6c17\u62b5\u6297\u52b9\u679c(MR\u52b9\u679c)\u3092\u5229\u7528\u3057\u3066\u3044\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u52b9\u679c\u306f\u3001\u78c1\u6c17\u30bb\u30f3\u30b5\u30fc\u304c\u5916\u90e8\u306e\u78c1\u5834\u306e\u5909\u5316\u3092\u691c\u51fa\u3059\u308b\u7269\u7406\u73fe\u8c61\u3067\u3042\u308a\u3001\u901a\u904e\u3059\u308b\u96fb\u6d41\u306b\u5fdc\u3058\u305f\u78c1\u5834\u306e\u5909\u5316\u3092\u611f\u77e5\u3059\u308b\u3053\u3068\u3067\u96fb\u6d41\u3092\u6e2c\u5b9a\u3057\u307e\u3059\u3002<\/p>\n<ul>\n<li><strong>\u30ac\u30ea\u30d0\u30ce\u78c1\u6c17\u52b9\u679c (GMI\u52b9\u679c):<\/strong> \u78c1\u6c17\u6750\u6599\u304c\u5916\u90e8\u78c1\u5834\u306b\u7f6e\u304b\u308c\u305f\u3068\u304d\u3001\u6750\u6599\u3092\u6d41\u308c\u308b\u96fb\u6d41\u306e\u30a4\u30f3\u30d4\u30fc\u30c0\u30f3\u30b9\u304c\u5909\u5316\u3059\u308b\u73fe\u8c61\u3067\u3059\u3002<\/li>\n<li><strong>\u78c1\u6c17\u62b5\u6297\u52b9\u679c (MR\u52b9\u679c):<\/strong> \u78c1\u5834\u306b\u3088\u3063\u3066\u5c0e\u4f53\u307e\u305f\u306f\u534a\u5c0e\u4f53\u306e\u96fb\u6c17\u62b5\u6297\u304c\u5909\u5316\u3059\u308b\u73fe\u8c61\u3092\u793a\u3057\u307e\u3059\u3002<\/li>\n<\/ul>\n<p>\u3053\u308c\u3089\u306e\u539f\u7406\u306b\u3088\u308a\u3001MEMS\u30d9\u30fc\u30b9\u306e\u96fb\u6d41\u30bb\u30f3\u30b5\u30fc\u306f\u3001\u6d41\u308c\u308b\u96fb\u6d41\u306e\u5f37\u3055\u306b\u6bd4\u4f8b\u3057\u3066\u5909\u5316\u3059\u308b\u78c1\u5834\u306e\u5f71\u97ff\u3092\u53d7\u3051\u308b\u3053\u3068\u3067\u3001\u96fb\u6d41\u306e\u6e2c\u5b9a\u3092\u884c\u3044\u307e\u3059\u3002<\/p>\n<h2>MEMS\u96fb\u6d41\u30bb\u30f3\u30b5\u30fc\u306e\u5229\u70b9<\/h2>\n<ul>\n<li><strong>\u5c0f\u578b\u6027:<\/strong> \u5fae\u7d30\u52a0\u5de5\u6280\u8853\u306b\u3088\u308a\u3001\u975e\u5e38\u306b\u5c0f\u3055\u306a\u30b5\u30a4\u30ba\u3067\u88fd\u9020\u3067\u304d\u307e\u3059\u3002<\/li>\n<li><strong>\u9ad8\u611f\u5ea6:<\/strong> \u5fae\u5c0f\u306a\u96fb\u6d41\u5909\u5316\u3082\u691c\u51fa\u53ef\u80fd\u3067\u3042\u308a\u3001\u9ad8\u7cbe\u5ea6\u306a\u6e2c\u5b9a\u304c\u53ef\u80fd\u3067\u3059\u3002<\/li>\n<li><strong>\u4f4e\u6d88\u8cbb\u96fb\u529b:<\/strong> MEMS\u30c7\u30d0\u30a4\u30b9\u306f\u4e00\u822c\u7684\u306b\u6d88\u8cbb\u96fb\u529b\u304c\u5c11\u306a\u304f\u3001\u7701\u30a8\u30cd\u30eb\u30ae\u30fc\u306b\u8ca2\u732e\u3057\u307e\u3059\u3002<\/li>\n<li><strong>\u7d71\u5408\u6027:<\/strong> \u96fb\u5b50\u56de\u8def\u3068\u306e\u7d71\u5408\u304c\u5bb9\u6613\u3067\u3042\u308a\u3001\u30b7\u30b9\u30c6\u30e0\u5168\u4f53\u3092\u7c21\u7d20\u5316\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/li>\n<\/ul>\n<h2>MEMS\u96fb\u6d41\u30bb\u30f3\u30b5\u30fc\u306e\u5fdc\u7528\u4f8b<\/h2>\n<ul>\n<li><strong>\u96fb\u529b\u76e3\u8996:<\/strong> \u96fb\u529b\u306e\u4f7f\u7528\u91cf\u3092\u6b63\u78ba\u306b\u628a\u63e1\u3059\u308b\u3053\u3068\u3067\u3001\u30a8\u30cd\u30eb\u30ae\u30fc\u30de\u30cd\u30b8\u30e1\u30f3\u30c8\u3092\u6700\u9069\u5316\u3059\u308b\u305f\u3081\u306b\u5229\u7528\u3055\u308c\u307e\u3059\u3002<\/li>\n<li><strong>\u5de5\u696d\u7528\u6a5f\u5668:<\/strong> \u30e2\u30fc\u30bf\u30fc\u306e\u96fb\u6d41\u3092\u76e3\u8996\u3057\u3001\u6a5f\u5668\u306e\u72b6\u614b\u3092\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u3067\u7ba1\u7406\u3057\u307e\u3059\u3002<\/li>\n<li><strong>\u81ea\u52d5\u8eca:<\/strong> \u96fb\u6c17\u81ea\u52d5\u8eca(EV)\u306e\u30d0\u30c3\u30c6\u30ea\u30fc\u7ba1\u7406\u30b7\u30b9\u30c6\u30e0(BMS)\u3067\u306e\u96fb\u6d41\u6e2c\u5b9a\u306b\u4f7f\u7528\u3055\u308c\u3001\u8eca\u4e21\u306e\u5b89\u5168\u6027\u3068\u52b9\u7387\u3092\u5411\u4e0a\u3055\u305b\u307e\u3059\u3002<\/li>\n<li><strong>\u643a\u5e2f\u6a5f\u5668:<\/strong> \u30b9\u30de\u30fc\u30c8\u30d5\u30a9\u30f3\u3084\u30bf\u30d6\u30ec\u30c3\u30c8\u306a\u3069\u306e\u643a\u5e2f\u6a5f\u5668\u306e\u96fb\u529b\u7ba1\u7406\u306b\u5f79\u7acb\u3061\u307e\u3059\u3002<\/li>\n<\/ul>\n<p>MEMS\u30d9\u30fc\u30b9\u306e\u96fb\u6d41\u30bb\u30f3\u30b5\u30fc\u306f\u3001\u305d\u306e\u9ad8\u5ea6\u306a\u6a5f\u80fd\u6027\u3001\u4fe1\u983c\u6027\u3001\u5c0f\u578b\u6027\u306b\u3088\u308a\u3001\u73fe\u4ee3\u306e\u96fb\u529b\u6280\u8853\u306e\u4e2d\u6838\u3092\u306a\u3059\u8981\u7d20\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002\u3055\u3089\u306b\u3001\u7814\u7a76\u958b\u767a\u304c\u9032\u3080\u306b\u3064\u308c\u3001\u3088\u308a\u591a\u304f\u306e\u5206\u91ce\u3067\u306e\u5fdc\u7528\u304c\u671f\u5f85\u3055\u308c\u307e\u3059\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>MEMS\u30d9\u30fc\u30b9\u306e\u96fb\u6d41\u30bb\u30f3\u30b5\u30fc\u306b\u7126\u70b9\u3092\u5f53\u3066\u3001\u305d\u306e\u539f\u7406\u3001\u5229\u70b9\u3001\u53ca\u3073\u7523\u696d\u3067\u306e\u5fdc\u7528\u4f8b\u306b\u3064\u3044\u3066\u89e3\u8aac\u3059\u308b\u8a18\u4e8b\u3067\u3059\u3002\u5c0f\u578b\u3067\u9ad8\u6027\u80fd\u306aMEMS\u6280\u8853\u304c\u3069\u306e\u3088\u3046\u306b\u96fb\u6d41\u6e2c\u5b9a\u306b\u9769\u547d\u3092\u3082\u305f\u3089\u3057\u3066\u3044\u308b\u304b\u3092\u7d39\u4ecb\u3002<\/p>\n","protected":false},"author":1,"featured_media":191221,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_generate-full-width-content":"","footnotes":""},"categories":[90],"tags":[91],"class_list":["post-167605","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-90","tag-91","generate-columns","tablet-grid-50","mobile-grid-100","grid-parent","grid-50"],"yoast_head":"<!-- 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